Particle and Aerosol Research Vol. 14, No. 4, December 2018, Pages 181-189 |
ISSN : 1738-8716 (Print) ISSN : 2287-8130 (Online) |
Numerical evaluation of risk rates for contamination sources in a minienvironment
Kwang-Chul Noh1) *
1)Air Lab co. Gwangju Republic of Korea
*Corresponding author. Tel.: +82-62-222-7617, E-mail: creative@c-airlab.com
Received 26 December 2018, Revised 27 December 2018, Accepted 28 December 2018, Available online 31 December 2018
http://dx.doi.org/10.11629/jpaar.2018.14.4.181
Abstracts
In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.
Keywords
cleanroom, contamination control, minienvironment, particle, risk rate
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