Particle and Aerosol Research
Vol. 13, No. 2, June 2017, Pages 65-77
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ISSN : 1738-8716 (Print)
ISSN : 2287-8130 (Online)
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A Study on Energy Reduction in an Outdoor Air Conditioning System for
Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification
Won-Il Song, Ki-Cheol Kim, Kyung-Hoon Yoo*, Dae-Kun Shin1), Kyung-Eung Tae2), Yong-Sik Kim3), Dug-Jun Park4)
Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)
1)Daehan PNC Co., Dangjin-si, 31721, Korea
2)Eunsung-chemical Co., Anseong-si, 17554, Korea
3)Samwoo System Co., Gwangmyeong-si, 14308, Korea
4)Sinsung ENG Co., Seongnam-si, 13543, Korea
Received 28 March 2017, Revised 01 May 2017, Accepted 02 May 2017, Available online 30 June 2017
http://dx.doi.org/10.11629/jpaar.2017.6.30.075
Abstracts
In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning
(OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total
cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy
consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a
cleanroom. In the present study, an experiment with an outdoor air flow rate of 1,000 m3/h was conducted to compare
the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry
cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried
out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple
air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC
systems using water spray humidification were more energy-efficient than the steam humidification OAC system.
Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.
Keywords
Cleanroom, Outdoor Air Conditioning, Energy Consumption, Water Spray Humidification, Air Washer,
Heat Recovery
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