Particle and Aerosol Research
Vol. 13, No. 2, June 2017, Pages 53-63
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ISSN : 1738-8716 (Print)
ISSN : 2287-8130 (Online)
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Development of particle focusing device to
monitor various low pressure processes
Myungjoon Kim1), Dongbin Kim2),3) , Sang-Woo Kang3),5), and Taesung Kim2),4) *
1)Environmental System Research Division, Korea Institute of Machinery and Materials
2)School of Mechanical Engineering, Sungkyunkwan University
3)Vacuum Center, Korea Research Institute of Standards and Science
4)Sungkyunkwan Advanced Institute of Nanotechnology, Sungkyunkwan University
5)Advanced Device Technology, University of Science and Technology
*Corresponding author.
Tel.: +82-31-290-7466, E-mail: tkim@skku.edu
Received 15 March 2017, Revised 04 April 2017, Accepted 17 April 2017, Available online 30 June 2017
http://dx.doi.org/10.11629/jpaar.2017.6.30.053
Abstracts
As semiconductor process was highly integrated, particle contamination became a major issue. Because particle
contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be
controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure
5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed
only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can
control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional
aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain
particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several
process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on
Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable
aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.
Keywords
Aerodynamic lenses, Aperture diameter changeable lens, CFD, Particle focusing
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