Particle and Aerosol Research
Vol. 12, No. 3, September 2016, Pages 57-63
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ISSN : 1738-8716 (Print)
ISSN : 2287-8130 (Online)
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Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles
Gibaek Kim1), Kyoungtae Kim2), Hyunok Maeng1), Hae Bum Lee1), and Kihong Park1)*
1)School of Earth Sciences and Environmental Engineering, Gwangju Institute of Science and Technology,
2)Manufacturing Engineering Team, Memory Division, Samsung Electronics Co., LTD.
*Corresponding author.
Tel.: +82-62-715-3279, E-mail: kpark@gist.ac.kr
Received 06 July 2016, Revised 20 September 2016, Accepted 24 September 2016, Available online 06 October 2016
http://dx.doi.org/10.11629/jpaar.2016.9.30.057
Abstracts
The laser-induced breakdown spectroscopy (LIBS) has been used for rapid detection of elemental compositions of various materials in multi-media (solid, liquid, gas, and aerosols). In this study, the aerosol-LIBS has been developed for real-time monitoring of process-induced particles produced during the semiconductor manufacturing. The developed aerosol-LIBS mainly consists of laser, optics, spectrometer, and aerosol chamber. A new aerosol chamber was constructed for the aerosol-LIBS to be applied for various semiconductor manufacturing process, including exhaust tubes, and low pressure and high temperature chamber. The aerosol-LIBS was evaluated by using laboratory generated aerosols for detection of various elements. As a result, P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is being conducted.
Keywords
Laser-induced breakdown spectroscopy, Process-induced particles, Real-time monitoring, spectrometer
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