Particle and Aerosol Research Vol. 11, No. 4, December 2015, Pages 93-98 |
ISSN : 1738-8716 (Print) ISSN : 2287-8130 (Online) |
Measurement of Particles Generated from PECVD Process using ISPM
Dongbin Kim1),2), Jihun Mun2), HyeongU Kim3), Byung Soo Kang2),4), JuYoung Yun2), SangWoo Kang2),4)*, and Taesung Kim1),3)**
1)Sungkyunkwan University of Mechanical Engineering, 2066 Seobu-ro, Suwon
2)Vacuum Technology Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon
3)Sungkyunkwan Advanced Institute of Nano Technology, Sungkyunkwan University, 2066 Seobu-ro, Suwon
4)Advanced Device Technology, University of Science & Technology, 305-350, Daejeon
*Corresponding author. Tel.: *+82-42-868-5669, **+82-31-299-4751, E-mail: *swkang@kriss.re.kr, **tkim@skku.edu
Received 18 June 2015, Revised 30 November 2015, Accepted 27 December 2015, Available online 06 January 2016
http://dx.doi.org/10.11629/jpaar.2015.11.4.093
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